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Materials

 

Accuflect®

Aluminum Nitride

Aluminum Oxide

Boron Nitride

Fused Silica

Macor®

Mullite

Sialon

Silicon Carbide

Silicon Nitride

Zirconium Oxide

 

 

Aluminum Nitride, AIN Ceramic Properties

Aluminum Nitride, formula AlN, is a newer material in the technical ceramics family. While its discovery occurred over 100 years ago, it has been developed into a commercially viable product with controlled and reproducible properties within the last 20 years.

.Key Aluminum Nitride Properties
check Good dielectric properties
check High thermal conductivity
check Low thermal expansion coefficient, close to that of Silicon
check Non-reactive with normal semiconductor process chemicals and gases
.

Typical Aluminum Nitride Uses
check Substrates for electronic packages
check Heat sinks
check IC packages
check Power transistor bases
check Microwave device packages
check Material processing kiln furniture
check Semiconductor processing chamber fixtures and insulators
check Molten metal handling components

General Aluminum Nitride Information

Aluminum nitride has a hexagonal crystal structure and is a covalent bonded material. The use of sintering aids and hot pressing is required to produce a dense technical grade material. The material is stable to very high temperatures in inert atmospheres. In air, surface oxidation begins above 700°C. A layer of aluminum oxide forms which protects the material up to 1370°C. Above this temperature bulk oxidation occurs. Aluminum nitride is stable in hydrogen and carbon dioxide atmospheres up to 980°C. The material dissolves slowly in mineral acids through grain boundary attack, and in strong alkalis through attack on the aluminum nitride grains. The material hydrolyzes slowly in water. Most current applications are in the electronics area where heat removal is important. This material is of interest as a non-toxic alternative to beryllia. Metallization methods are available to allow AlN to be used in place of alumina and BeO for many electronic applications.

 

Aluminum Nitride Engineering Properties*

Aluminum Nitride

Mechanical

Units of Measure

SI/Metric

(Imperial)

Density

gm/cc (lb/ft3)

3.26

(203.5)

Porosity

% (%)

0

(0)

Color

—

gray

—

Flexural Strength

MPa (lb/in2x103)

320

(46.4)

Elastic Modulus

GPa (lb/in2x106)

330

(47.8)

Shear Modulus

GPa (lb/in2x106)

—

—

Bulk Modulus

GPa (lb/in2x106)

—

—

Poisson’s Ratio

—

0.24

(0.24)

Compressive Strength

MPa (lb/in2x103)

2100

(304.5)

Hardness

Kg/mm2

1100

—

Fracture Toughness KIC

MPa•m1/2

2.6

—

Maximum Use Temperature
(no load)

°C (°F)

—

—

Thermal




Thermal Conductivity

W/m•°K (BTU•in/ft2•hr•°F)

140–180

(970–1250)

Coefficient of Thermal Expansion

10–6/°C (10–6/°F)

4.5

(2.5)

Specific Heat

J/Kg•°K (Btu/lb•°F)

740

(0.18)

Electrical




Dielectric Strength

ac-kv/mm (volts/mil)

17

(425)

Dielectric Constant

@ 1 MHz

9

(9)

Dissipation Factor

@ 1 MHz

0.0003

(0.0003)

Loss Tangent

@ 1 MHz

—

—

Volume Resistivity

ohm•cm

>1014

—

*All properties are room temperature values except as noted.
The data presented is typical of commercially available material and is offered for comparative purposes only. The information is not to be interpreted as absolute material properties nor does it constitute a representation or warranty for which we assume legal liability. User shall determine suitability of the material for the intended use and assumes all risk and liability whatsoever in connection therewith.

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